MEASURING METHOD OF PHYSICO-CHEMICAL CHARACTERISTIC OF MEASUREMENT OBJECT IN SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a measuring method capable of measuring the physico-chemical characteristics of a measurement object in a sample efficiently even in the case of a multi-layer sample.;SOLUTION: This measuring method of the physico-chemical characteristics of the measurement object in the sample is characterized by forming a cut surface on the sample including the measurement object, and measuring the measurement object on the cut surface by a noncontact measuring means. Especially, the method is highly effective when the cut surface is oblique.;COPYRIGHT: (C)2007,JPO&INPIT