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The reluctance effective die magnetometric sensor and structure membrane of the spin valve die enormous reluctance
The reluctance effective die magnetometric sensor and structure membrane of the spin valve die enormous reluctance
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机译:磁阻有效模磁传感器和旋转阀的结构膜模极大的磁阻
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摘要
PROBLEM TO BE SOLVED: To manufacture a spin valve type giant magnetoresistive effect type magnetic sensor, as well as a magnetoresistive effect type magnetic head, which uses an anti- ferromagnetic layer for stabilizing bias, capable of, in a limited manner, electrifying a sense current in the region of high sensitivity. SOLUTION: There are provided a process where a mask layer which comprises a wide head part and a narrow neck part nearer to a base part is formed on a magnetization free layer 14, a process where an antiferromagnetic layer 42 for stabilizing bias to the magnetization free layer 14 is formed from above the mask layer, across the entire surface, by a coating method having directivity in the direction almost vertical to the surface of a component film, a process where an insulating layer 43 is formed from above the mask layer, across the entire surface, by a coating method diagonally incident on the surface of the component film, and a process where the antiferromagnetic layer 42 for stabilizing bias and the insulating layer 43 which stick to the mask layer are selectively removed. A sense current is limitedly electrified in the region where the antiferromagnetic layer 42 for stabilizing bias and the insulating layer 43 are removed, to improve sensitivity and for stabilization.
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