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FILM DEPOSITION METHOD, PIEZOELECTRIC FILM FORMED BY THE FILM DEPOSITION METHOD, PIEZOELECTRIC ELEMENT WITH THE PIEZOELECTRIC FILM, AND INK JET APPARATUS USING THE PIEZOELECTRIC ELEMENT
FILM DEPOSITION METHOD, PIEZOELECTRIC FILM FORMED BY THE FILM DEPOSITION METHOD, PIEZOELECTRIC ELEMENT WITH THE PIEZOELECTRIC FILM, AND INK JET APPARATUS USING THE PIEZOELECTRIC ELEMENT
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机译:膜沉积方法,由膜沉积方法制成的压电膜,具有压电膜的压电元件以及使用该压电元件的喷墨装置
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摘要
PROBLEM TO BE SOLVED: To easily deposit a film of a desired pattern without using a mask or the like in a film deposition method using an aerosol deposition method.;SOLUTION: Particles are jetted toward a base body surface to deposit a film made of a material constituting the particle. This film deposition method comprises: a process of preparing a substrate having a surface equipped with at least two regions different in material depositing rate; and a process of selectively depositing the film containing a film-forming material on the region of larger coarseness of the two regions by jetting many particles containing the film depositing material onto the surface.;COPYRIGHT: (C)2007,JPO&INPIT
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