Quality evaluation method of manufacturing method and cerium-based abrasive of cerium-based abrasive and cerium-based abrasive

摘要

PROBLEM TO BE SOLVED: To provide a cerium type abrasive capable of restraining the generation of a scratch which cannot be eliminated by conventional cerium type abrasives.;SOLUTION: In a cerium oxide type abrasive containing 45-70 wt% cerium oxide to the total rare earth oxides, this cerium type abrasive has such characteristic that if the ratio of the main peak intensity of the LnOF to the main peak intensity of the CeO₂, (LnOF/CeO₂), measured by an X-ray diffraction method (using a copper target, and Cu-K_α1 line) for the cerium type abrasive is S0, and that measured in the same manner for coarse particles separated from the cerium type abrasive having a diameter of not smaller than 5 μm is S1, they satisfies the relations S0 ≤0.6 (1) and 0.2≤S1/S0≤1.2 (2).;COPYRIGHT: (C)2004,JPO&NCIPI