In the inactive atmosphere which

摘要

PROBLEM TO BE SOLVED: To efficiently perform filtering while inert gases are cooled in a chamber for soldering. ;SOLUTION: Soldering is performed on a substrate P, which is transported by a conveyor 21 in an inert atmosphere held in a chamber 12, by means of molten solder S jetted from an injection nozzle 17 of a solder pool 11. The device is provided with a feeding part 31 for supplying inert gases G into the chamber 12 and an exhaust part 32 for discharging the gasses G inside the chamber 12. In addition, provided at the rear door of the device body 13 is a cooling purifier 35 which separates and removes impurities mixed in the inert gases, while cooling the gasses discharged from the exhaust part 32, and which therefore circulates only the inert gasses to the feeding part 31.;COPYRIGHT: (C)1998,JPO