Shape measuring method and NC machining apparatus using the probe type and shape measurement sensor

摘要

A probe head 10 for supporting the contactor 2 in contact with the object 1 to be measured is movably supported to the object to be measured, and is biased toward the object to be measured, and a laser interference displacement meter 20 for measuring the displacement of the contact in a non-contact manner. The probe head 10 is provided with a probe shaft 12 having steps 11a and 11b at an intermediate portion, and gas bearings 14a and 14b for supporting the front and rear of the step difference. The gas bearing has a high rigidity in the radial direction and floats the probe shaft by compressed air to reduce the sliding resistance. Further, the urging force directed to the object to be measured by the difference in area of the stepped portion is held constant by a different amount of compressed air supplied to the step portion to a small load in a predetermined range. As a result, the measurement pressure can be adjusted to a small load without decreasing the bearing rigidity of the probe, and the measurement pressure can be changed freely, and the submicron accuracy of about It can be easily applied to the airborne measurement.