Opener of the pod clamp unit, pod clamp mechanism and clamp method using the pod clamp unit

摘要

PROBLEM TO BE SOLVED: To provide a clamp mechanism having no possibility of touching the lower surface of a pod when it is mounted on a mounting table at a load port.;SOLUTION: The unit 1 for clamping a pod 56 comprises clamp arms 3b and 4b capable of clamping the clamped part 33 of the pod 56 at the forward end part thereof, a mechanism 8 for driving the clamp arms 3b and 4b to perform clamp and release operations, and a mechanism 7 for elevating/lowering the clamp arms 3b and 4b with respect to the surface of the mounting table along with the clamp member drive mechanism 8. An inclining face 3c making a predetermined angle against the vertical direction is formed at the forward end of at least one clamp arm 3b.;COPYRIGHT: (C)2005,JPO&NCIPI