Vacuum devices and surface treatment method for aluminum or aluminum alloy is used for the component, vacuum devices and parts thereof

摘要

PROBLEM TO BE SOLVED: To provide a surface treatment method for aluminum or aluminum alloy used for a vacuum device which is reduced in gas discharge amount and its components, and to provide the vacuum device and its components.;SOLUTION: In the surface treatment method for the aluminum or aluminum alloy used for the vacuum device and its components, porous type anodic oxidation is performed and thereafter barrier type anodically oxidized films are grown within all of the pores of the porous type anodic oxidation film.;COPYRIGHT: (C)2005,JPO&NCIPI