Leak Testing Equipment for high-performance air filter

摘要

PROBLEM TO BE SOLVED: To provide a device capable of performing leak inspection accurately and automatically in the state where a diffuser is installed in a non-single directional flow type clean room.;SOLUTION: A masker having a dividing wall stickable onto the ceiling surface in the state where the under surface of at least one air filter is completely enclosed, a suction probe, a traverse mechanism, a particle counter, a lifting mechanism, a driving motor, and a central control part for operating and controlling each part are loaded on a moving truck. The moving truck is stopped under the air filter which is a measuring object, and the suction probe is scanned in the state where the masker is stuck onto the ceiling surface to enclose the air filter, and the number of particles are measured by the particle counter, to thereby detect a leak and to specify a leak spot.;COPYRIGHT: (C)2005,JPO&NCIPI