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Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch
Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch
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机译:密封的弹性体粘结的Si电极等用于减少介电蚀刻中的颗粒污染
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摘要
An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing having a backing member having a bonding surface, an inner electrode having a lower surface on one side and a bonding surface on the other side, and an outer electrode having a lower surface on one side and a bonding surface on the other side. At least one of the electrodes has a flange, which extends underneath at least a portion of the lower surface of the other electrode.
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