Phase shifting grating-slit test for optical surface reconstruction

摘要

An optical system representing the configuration of a tested element disposed therein is provided. The optical system comprises a light source emitting a spatial-incoherent light having a phase shifting scheme toward the tested element and then forming an image with a transverse ray aberration on the image plane of the tested element; a spatial filter on the image plane to spatially filter the image formed by the tested element; and a detection module comprising a detector for receiving the spatially filtered image.