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Phase shifting grating-slit test for optical surface reconstruction
Phase shifting grating-slit test for optical surface reconstruction
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机译:用于光学表面重建的相移光栅狭缝测试
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摘要
An optical system representing the configuration of a tested element disposed therein is provided. The optical system comprises a light source emitting a spatial-incoherent light having a phase shifting scheme toward the tested element and then forming an image with a transverse ray aberration on the image plane of the tested element; a spatial filter on the image plane to spatially filter the image formed by the tested element; and a detection module comprising a detector for receiving the spatially filtered image.
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