首页> 外国专利> Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method

Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method

机译:碱性溶液和制造方法,以及应用于图案形成方法,抗蚀剂膜去除方法,溶液施加方法,衬底处理方法,溶液供应方法和半导体器件制造方法的碱性溶液

摘要

A manufacturing method of an alkaline solution, comprising dissolving a gaseous molecule having oxidizing properties or reducing properties in an aqueous alkaline solution.
机译:一种碱性溶液的制造方法,包括将具有氧化性质或还原性质的气态分子溶解在碱性水溶液中。

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