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Planar inductor using liquid metal MEMS technology
Planar inductor using liquid metal MEMS technology
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机译:使用液态金属MEMS技术的平面电感器
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摘要
Using MEMS device design and fabrication techniques, liquid metal inductors can be formed. Because of the common fabrication techniques, liquid metal inductors can be more easily integrated with certain MEMS microswitches.
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