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Adjusting field conditions in linear ion processing apparatus for different modes of operation

机译:针对不同的操作模式调整线性离子处理设备中的电场条件

摘要

Methods for applying an RF field in a two-dimensional electrode structure include applying RF voltages to one or more main electrodes and compensation electrodes. The voltages on the one or more compensation electrodes may be adjusted to be proportional to the voltages on the main electrodes. The adjustment(s) may be done to optimize the RF field for different modes of operation such as ion ejection and ion dissociation. For dissociation and other procedures involving ion excitation, the voltages applied to the one or more compensation electrodes may be different from the voltages applied to the one or more main electrodes. Electrode structures may include main trapping electrodes, one or more compensation electrodes, one or more ion exit apertures, and a device or circuitry for applying the various desired voltages.
机译:在二维电极结构中施加RF场的方法包括将RF电压施加到一个或多个主电极和补偿电极。可以将一个或多个补偿电极上的电压调整为与主电极上的电压成比例。可以进行调整以针对诸如离子喷射和离子解离的不同操作模式优化RF场。对于离解和涉及离子激发的其他程序,施加到一个或多个补偿电极的电压可以不同于施加到一个或多个主电极的电压。电极结构可以包括主捕获电极,一个或多个补偿电极,一个或多个离子出口孔,以及用于施加各种期望电压的装置或电路。

著录项

  • 公开/公告号US2007176096A1

    专利类型

  • 公开/公告日2007-08-02

    原文格式PDF

  • 申请/专利权人 GREGORY J. WELLS;

    申请/专利号US20060342487

  • 发明设计人 GREGORY J. WELLS;

    申请日2006-01-30

  • 分类号H01J49/42;

  • 国家 US

  • 入库时间 2022-08-21 21:05:04

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