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TRAJECTORY MAPPING FOR IMPROVED MOTION-SYSTEM JITTER WHILE MINIMIZING TRACKING ERROR
TRAJECTORY MAPPING FOR IMPROVED MOTION-SYSTEM JITTER WHILE MINIMIZING TRACKING ERROR
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机译:在跟踪误差最小化的情况下改善运动系统抖动的轨迹映射
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摘要
Methods and apparatus to compensate for low-frequency tracking errors in motion control of a movable stage are provided. By recording tracking errors during earlier traversal of a trajectory, filtering, and applying those recorded tracking errors to subsequent traversals of the same or a similar trajectory, tracking errors of the subsequent traversals may be significantly reduced.
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