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Fabry-Perot resonator apparatus and method for observing low reflectivity surfaces

机译:法布里-珀罗共振器装置和用于观察低反射率表面的方法

摘要

A Fabry-Perot resonator apparatus and method for observing low reflectivity surfaces provides functional improvements for optical inspection and measurement systems, optical storage and retrieval systems as well as other optical systems when the a surface of interest in the resonator path has a lower than ideal reflectivity. The Fabry-Perot resonator is designed with an angle of incidence on the surface of interest deviating from normal incidence, effectively raising the reflectivity. Resonance is supported either by one or more reflectors oriented at angles with respect to the surface of interest, or by a focusing system that alters the directive angle of optical path(s) within the resonator such that the angle of incidence at an intersection of the optical path with the surface of interest is an angle other than normal. A normal incidence is maintained at the reflector(s), so that resonance is supported between the surface of interest and the reflector(s).
机译:当谐振器路径中感兴趣的表面的反射率低于理想反射率时,用于观察低反射率表面的Fabry-Perot谐振器设备和方法可为光学检查和测量系统,光学存储和检索系统以及其他光学系统提供功能上的改进。 Fabry-Perot谐振器的设计目的是使感兴趣表面上的入射角偏离法线入射角,从而有效提高反射率。共振由一个或多个相对于感兴趣表面成一定角度的反射器支撑,或者由聚焦系统改变,该聚焦系统改变谐振器内光路的指向角,使得入射角在入射角的交点处。感兴趣的表面的光路不是法线。在反射器处保持法向入射,从而在感兴趣的表面和反射器之间支持共振。

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