Image defect inspection apparatus, image defect inspection system, defect classifying apparatus, and image defect inspection method

摘要

An image defect inspection apparatus, which detects a gray level difference between corresponding pixels in two inspection images and which, if the gray level difference exceeds a detection threshold value, judges that one or the other of the pixels in the two inspection images represents a defect, comprises: a variance computing unit which computes the variance of the coordinate value of the pixel by weighting the coordinate value in accordance with the gray level difference detected for the pixel; and a detection sensitivity reducing unit which reduces the detection sensitivity for the defect as the variance increases.