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METHOD FOR HIGH PERFORMANCE INDUCTOR FABRICATION USING A TRIPLE DAMASCENE PROCESS WITH COPPER BEOL
METHOD FOR HIGH PERFORMANCE INDUCTOR FABRICATION USING A TRIPLE DAMASCENE PROCESS WITH COPPER BEOL
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机译:铜三元三重过程的高性能电感制造方法
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摘要
A method of forming a high performance inductor comprises providing a substrate; forming a plurality of wiring levels over the substrate, wherein each of the wiring levels comprise a dielectric layer; forming a first trench having a first depth in a first dielectric layer on a first wiring level; forming a second trench in the first dielectric layer having a second depth extending at least into a second wiring level; forming a conductor layer substantially simultaneously in the first and second trenches; and removing portions of the conductor layer overfilling the first and second trenches to form a spiral-shaped inductor in the second trench. The method may further comprise forming an interconnect structure in the first trench.
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