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Magnetic memory device, a method for manufacturing a magnetic memory device, and an integrated circuit device including such magnetic memory device
Magnetic memory device, a method for manufacturing a magnetic memory device, and an integrated circuit device including such magnetic memory device
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机译:磁存储器件,用于制造磁存储器件的方法以及包括该磁存储器件的集成电路器件
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摘要
This invention proposes a stable magnetic memory device that is equipped with a storage cell having a MTJ, wherein variation in the coercive force (Hc) of a ferromagnetic free layer is suppressed, and a switching characteristic of a bit of a MRAM is improved, and there is no write error. Namely in a magnetic memory device equipped with a first wiring, a second wiring (bit line) intersecting with the first wiring, and a storage cell for writing/reading information of a magnetic spin at an intersecting area of the first wiring and the second wiring, a partial sidewall portion electrically connecting to the storage cell of the second wiring (bit line) has a forward tapered form having a contact angle relative to a top surface of the storage cell being 45 degrees or more.
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