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Optical system with a high germanium concentration silicon germanium alloy including a graded buffer layer
Optical system with a high germanium concentration silicon germanium alloy including a graded buffer layer
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机译:具有高锗浓度的硅锗合金的光学系统,包括渐变缓冲层
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摘要
A method of forming a high germanium concentration, low defect density silicon germanium film and its associated structures is described, comprising forming a dielectric layer on a substrate, patterning the dielectric layer to form a silicon region and at least one dielectric region, and forming a low defect silicon germanium layer on at least one dielectric region.
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