Method of manufacturing an ink jet recording head having reduced stress concentration near the boundaries of the pressure generating chambers

摘要

AnA method of manufacturing an ink-jet recording head comprising:which includes an elastic sheet providingfacing pressure generating chambers;, nozzle orifices, each communicating with the pressure generating chambers;, and piezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet, the method including forming a piezoelectric layer formed on the lower electrode, and forming an upper electrode formed on the piezoelectric layer such that the upper electrode faces the respective pressure generating chamber, wherein thearea where the lower electrode, piezoelectric layer and upper electrode overlap is located within an area defined by the pressure generating chamber in the longitudinal direction thereof. The upper electrodes of the piezoelectric vibrators are positioned independently of each other;and an electrical insulator layer having windows, wherein the electrical insulator layer coversis formed to cover the upper electrodes;, and a conductor pattern connecting withis connected to the upper electrodes via the windows of the electrical insulator layer.