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Beam current measuring device and apparatus using the same
Beam current measuring device and apparatus using the same
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机译:束流测量装置及使用该束流测量装置的装置
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摘要
A beam current measuring device (BMD) capable of measuring beam current while radiating the beam on a target, such as a semiconductor wafer. The BMD at least includes: (a) a detecting part operable to detect or collect a magnetic field corresponding to the beam current; and (b) a measuring part including (i) a SQUID sensitive to magnetic flux, and (ii) a feedback coil operable to carry feedback current wherein the feedback current is operable to cancel out a change in the magnetic flux penetrating through the SQUID. Wherein the operating point of the SQUID is set according to a finite beam current value, other than zero, which penetrates through the detecting part.;A BMD of the present invention can be incorporated and used in an ion-implantation apparatus, an electron beam exposure apparatus, an accelerator, and the like.
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