A TEST STRUCTURE FOR MONITORING SALICIDE AND LOCAL INTERCONNECT PROCESSES DURING DEVELOPMENT AND PRODUCTION PHASES

摘要

A testing device for monitoring salicide and local interconnect process comprising a plurality of transistor (T) provided in a plurality of rows (R) and columns (C) in order to form a matrix of transistors, the transistors are connected with each other to select each transistor by choosing a particular row and a particular column, the gate and drain of said transistor being shorted by TiN local interconnect.