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A TESTING DEVICE AND METHOD FOR MONITORING SALICIDE AND LOCAL INTERCONNECT PROCESS'
A TESTING DEVICE AND METHOD FOR MONITORING SALICIDE AND LOCAL INTERCONNECT PROCESS'
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机译:监测硅化物和局部互连过程的测试装置和方法”
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摘要
A testing device for monitoring salicide and local interconnect process comprising a plurality of transistor (T) provided in a plurality of rows (R) and columns (C) in order to form a matrix of transistors, the transistors are connected with each other to select each transistor by choosing a particular row and a particular column, the gate and drain of said transistor being shorted by TiN local interconnect.
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