FET-BASIERTER SENSOR ZUR DETEKTION VON REDUZIERENDEN GASEN ODER ALKOHOL,HERSTELLUNGS -UND BETRIEBSVERFAHREN

摘要

The invention relates to sensors for detecting especially reducing gases, and to an associated production and operation "method. An FET-bascd gas sensor consists of at least one field effect transistor, and at least one gas-sensitive layer and a reference layer. According to the invention, the work function changes generated on the two layer materials when subjected to gas are used to control the field effect structures. The gas-sensitive layer consisting of a metal oxide comprises an oxidation catalyst on the surface thereof that can be accessed by the measuring gas.