METHOD OF PRODUCING GERMANOSILICATE WITH A HIGH REFRACTIVE INDEX CHANGE

摘要

The present invention relates to a method of producing germanosilicate. The formed germanosilicate comprises a refractive index change Δn. The method includes forming a gel from a sol comprising germaniumoxide, or a precursor thereof, and silicate, or a precursor thereof, by means of a sol-gel process. The method further includes forming germanosilicate by annealing the gel under elevated temperature and exposing the formed germanosilicate to pulsed UV light of at least 350 mJ/pulse.