DIELECTRIC SPACER FOR ENHANCED SQUEEZE-FILM DAMPING OF MOVABLE MEMBERS OF MEMS DEVICES

摘要

In one embodiment, a capacitive micro electro-mechanical systems (MEMS) device (500) includes a dielectric spacer (502) between a bottom electrode (503) and a movable member (501). The movable member (501) may serve as a top electrode. A gap (614) separates the top electrode from the dielectric spacer (502). The movable member (501) may be actuated to deflect towards the bottom electrode (503) by electrostatic force. The dielectric spacer (502) reduces the height of the gap that would otherwise be formed between a top surface of the bottom electrode (503) and a bottom surface of the movable member (501), thereby improving squeeze-film damping. The movable member (501) may be a ribbon of a ribbon-type diffractive spatial light modulator, for example.