Liquid discharge head substrate, liquid discharge head, liquid discharge apparatus having these elements, manufacturing method of liquid discharge head, and driving method of the same

摘要

A liquid discharge head substrate used for a liquid discharge head is adapted to discharge liquid by applying discharge energy to the liquid, and has a semiconductor substrate including an energy conversion element for converting electric energy into the discharge energy. In this case, the liquid discharge head substrate comprises a function element (FeRAM) made of a ferroelectric material (32), which is formed in the semiconductor substrate.