首页>
外国专利>
VAPOR JET VACUUM PUMP HAVING EJECTOR STAGE IN FORELINE CONDUIT
VAPOR JET VACUUM PUMP HAVING EJECTOR STAGE IN FORELINE CONDUIT
展开▼
机译:在前级管道中具有喷射级的蒸气喷射真空泵
展开▼
页面导航
摘要
著录项
相似文献
摘要
A vapor jet vacuum pump includes a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and at least one ejector stage. The ejector stage includes an ejector nozzle mounted in the foreline conduit and a fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle. The fluid inlet may be an air inlet for drawing in air at atmospheric pressure. The ejector stage may be driven by a backing pump coupled to the foreline conduit.
展开▼