Micro structure, cantilever, scanning probe microscope and a method for measuring deformation quantity for the micro structure

摘要

It is desired that highly efficient and highly sensitive sensors being extremely small size is provided in desired position, desired shape and size for a micro structure that causes the elastic deformation at least a part thereof. Moreover, it is also required that facilitating to assemble and adjust the components, miniaturizing and simplifying the detection circuit, and measuring a local displacement of a fine part of the micro structure.;The disclosing micro structure is cantilever 1 which beam part 14 causes the elastic deformation. This cantilever 1 is provided with a sensor 12 detecting elastic deformation of beam part 14 by tunneling effect.