公开/公告号WO2007109252A2
专利类型
公开/公告日2007-09-27
原文格式PDF
申请/专利权人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC.;RENAU ANTHONY;SINGH VIKRAM;GUPTA ATUL;MILLER TIMOTHY;AREVALO EDWIN;PAPASOULIOTIS GEORGE;JEON YONG BAE;
申请/专利号WO2007US06879
发明设计人 SINGH VIKRAM;MILLER TIMOTHY;JEON YONG BAE;PAPASOULIOTIS GEORGE;GUPTA ATUL;AREVALO EDWIN;RENAU ANTHONY;
申请日2007-03-20
分类号H01L21/66;
国家 WO
入库时间 2022-08-21 20:47:38