SYSTEM AND METHOD TO MEASURE NANO-SCALE STRESS AND STRAIN IN MATERIALS

摘要

A system for measuring stress and strain in a sample (55) is provided. The system includes a sample holder (65) operable to support the sample; a stress inducing assembly (85) operable to apply force to a selected location on the sample to deform the sample by a selected distance in a range from about 0.1 angstrom to about a millimeter; and an interferometer (15) operable to determine a surface topography of the deformed sample at a resolution in a range from about 0.1 angstrom to about a micron.