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EMERGENCY STOP DEVICE, ELECTRONIC-COMPONENT TESTING DEVICE WITH THE SAME, AND EMERGENCY STOP METHOD FOR ELECTRONIC COMPONENT TESTING DEVICE
EMERGENCY STOP DEVICE, ELECTRONIC-COMPONENT TESTING DEVICE WITH THE SAME, AND EMERGENCY STOP METHOD FOR ELECTRONIC COMPONENT TESTING DEVICE
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机译:紧急停止装置,具有该紧急停止装置的电子部件测试装置以及用于电子部件测试装置的紧急停止方法
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摘要
An emergency stop device (30) for making an emergency stop of an electronic-component testing device (1) when a disaster occurs has a receiving section (31) capable of receiving a disaster occurrence signal for calling attention to the occurrence of the disaster, a determination section (32) for determining whether the disaster occurrence signal continues for a predetermined time, and a discontinuation section (33) for causing a test of an IC device by a tester (20) to be discontinued based on the result of the determination by the determination section (32). After the discontinuation section (33) discontinues the test by the tester, the tester (20) sends a command signal to a control device (75) of a prober (70) so that the IC device is separated from the probe card (50).
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