首页>
外国专利>
NON-CONTACT REVOLVING STAGE AND A METHOD FOR DETECTING THE SIX DEGREE-OF-FREEDOM POSITION THEREOF
NON-CONTACT REVOLVING STAGE AND A METHOD FOR DETECTING THE SIX DEGREE-OF-FREEDOM POSITION THEREOF
展开▼
机译:非接触式旋转阶段及其确定六个自由度位置的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A non-contact revolving stage is provided to perform the rotation of a rotor and minute perturbation toward a semi-diameter direction of a rotor, by stable floating of the rotor with only magnetic force between a stator and the rotor. In a non-contact revolving stage system, a longitudinal magnetic flux induction motor(120,121,122) comprises a plurality of electromagnets. The electromagnets are arranged along a circumference direction in an equivalent gap. A secondary part comprising a conductor(110) and a yoke(111) is arranged on the bottom of the induction motor. The secondary part is floated and rotated without contacting with the induction motor.
展开▼