Electromagnetic MEMS scanning micromirror and optical scanning device thereby
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机译:电磁MEMS扫描微镜及光学扫描装置
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摘要
Disclosed herein is an electromagnetic scanning micro-mirror for use in an optical scanning device. The electromagnetic micro-mirror, which is designed to reflect an input light beam using an electromagnetic force, is able to perform a rotating operation, to achieve a modulation in a path of a reflected light beam. The electromagnetic scanning micro-mirror comprise a magnetic field generator for supplying a magnetic field, a mirror plate having a reflective plane and a frame structure attached to a rear surface of the reflective plane, a substrate to surround the mirror plate, a pair of torsion bars to connect the mirror plate to the substrate, and a magnetic substance provided at the rear surface of the reflective plane of the mirror plate and adapted to generate a drive force by interacting with the magnetic field supplied from the magnetic field generator. The mirror plate performs a rotation operation about the torsion bars, which define a rotating axis of the mirror plate, by use of the drive force generated from the magnetic substance.
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