首页> 外国专利> ORGANIC THIN FILM TRANSISTOR, FLAT PANEL DISPLAY APPARATUS COMPRISING THE ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE FLAT PANEL DISPLAY APPARATUS

ORGANIC THIN FILM TRANSISTOR, FLAT PANEL DISPLAY APPARATUS COMPRISING THE ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE FLAT PANEL DISPLAY APPARATUS

机译:有机薄膜晶体管,包括有机薄膜晶体管的平板显示装置,有机薄膜晶体管的制造方法,平板显示器的制造方法

摘要

An organic TFT is provided to embody a preciser and clearer image by remarkably reducing contact resistance between a source/drain electrode and an organic semiconductor layer. A gate electrode(321) is formed on a substrate. The gate electrode is covered with a gate insulation layer. A source electrode(323) and a drain electrode(324) are formed on the gate insulation layer. The source electrode and the drain electrode are covered with photoresist(325). An exposure and development process is performed on the photoresist through the substrate to expose at least a part of the source electrode and the drain electrode. A metal layer is formed to cover the source electrode, the drain electrode and the photoresist. The photoresist is removed. An organic semiconductor layer is formed to come in contact with the metal layer on the source electrode and the drain electrode. The gate electrode is made of an opaque material whereas the source electrode and the drain electrode are made of a transparent material. The photoresist can be positive photoresist.
机译:提供有机TFT以通过显着减小源/漏电极与有机半导体层之间的接触电阻来体现更精确和更清晰的图像。在基板上形成栅电极(321)。栅电极被栅绝缘层覆盖。在栅绝缘层上形成源电极(323)和漏电极(324)。源极和漏极被光刻胶覆盖(325)。通过基板对光致抗蚀剂进行曝光和显影工艺,以暴露出源电极和漏电极的至少一部分。形成金属层以覆盖源电极,漏电极和光致抗蚀剂。光刻胶被去除。形成有机半导体层以使其与源电极和漏电极上的金属层接触。栅电极由不透明材料制成,而源电极和漏电极由透明材料制成。光刻胶可以是正性光刻胶。

著录项

  • 公开/公告号KR100647704B1

    专利类型

  • 公开/公告日2006-11-23

    原文格式PDF

  • 申请/专利权人 SAMSUNG SDI CO. LTD.;

    申请/专利号KR20050089490

  • 发明设计人 LEE HUN JUNG;KIM SUNG JIN;JEONG JONG HAN;

    申请日2005-09-26

  • 分类号H01L29/786;

  • 国家 KR

  • 入库时间 2022-08-21 20:41:13

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