首页>
外国专利>
ORGANIC THIN FILM TRANSISTOR, FLAT PANEL DISPLAY APPARATUS COMPRISING THE ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE FLAT PANEL DISPLAY APPARATUS
ORGANIC THIN FILM TRANSISTOR, FLAT PANEL DISPLAY APPARATUS COMPRISING THE ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE FLAT PANEL DISPLAY APPARATUS
An organic TFT is provided to embody a preciser and clearer image by remarkably reducing contact resistance between a source/drain electrode and an organic semiconductor layer. A gate electrode(321) is formed on a substrate. The gate electrode is covered with a gate insulation layer. A source electrode(323) and a drain electrode(324) are formed on the gate insulation layer. The source electrode and the drain electrode are covered with photoresist(325). An exposure and development process is performed on the photoresist through the substrate to expose at least a part of the source electrode and the drain electrode. A metal layer is formed to cover the source electrode, the drain electrode and the photoresist. The photoresist is removed. An organic semiconductor layer is formed to come in contact with the metal layer on the source electrode and the drain electrode. The gate electrode is made of an opaque material whereas the source electrode and the drain electrode are made of a transparent material. The photoresist can be positive photoresist.
展开▼