Fabrication process by LIGA type technology, of a monolayer or multilayer metallic structure, and structure obtained therewith

摘要

The manufacture a single/multi layered metallic structure using lithography, electroforming and molding ultraviolet technology, comprises spreading out a photoresist layer on a massive metallic substrate, creating a photoresist mold by irradiation/electronic/ionic bombardment, heating the photoresist layer for evaporating a solvent, exposing the photoresist layer through a mask corresponding to desired imprint under an ultraviolet radiation of 100-2000 mJ/cm 2 measured at a wavelength of 365 nm, and annealing the layer for complete photopolymerization/photodecomposition. The manufacture a single/multi layered metallic structure using lithography, electroforming and molding ultraviolet technology, comprises spreading out a photoresist layer on a massive metallic substrate, creating a photoresist mold by irradiation/electronic/ionic bombardment, heating the photoresist layer for evaporating a solvent, exposing the photoresist layer through a mask corresponding to desired imprint under an ultraviolet radiation of 100-2000 mJ/cm 2 measured at a wavelength of 365 nm, annealing the layer for complete photopolymerization/photodecomposition, developing the layer by dissolution of non- polymerized/photodecomposed parts, galvanically depositing a metal/an alloy in the exposed parts of the photoresist mold, leveling the metal/alloy by a machine to obtain a plane upper surface (2), producing an electroformed mechanical structure on the upper surface of the plane, detaching the metallic structure and the polymerized photoresist massive metallic substrate by delamination, separating the polymerized photoresist from the substrate, placing a fixed object above the massive metallic substrate in a removable way after the step of spreading and heating of the layer, and releasing the object of the massive metallic substrate to obtain the single/multi layered metallic structure with entirely superimposed layers having an inserted object, placing a screw in a threaded hole on the massive metallic substrate, which passes on top of the upper surface of the substrate, and unscrewing the screw to obtain the singe/multi-layered metallic structure with entirely superimposed layers having a threaded hole. The massive metallic substrate has a textured upper surface with micro-beading, mechanical-chemical etching or laser, and a polished upper surface in which the substrate is made up of stainless steel. An independent claim is included for a processed metallic structure.