ROBOT ARM SYSTEM FOR REMOVING STATIC ELECTRICITY AND SYSTEM FOR REMOVING STATIC ELECTRICITY HAVING THE SAME

摘要

A robot arm system for eliminating static electricity and an electrostatic eliminating system having the same are provided to spray compressed ion air when a semiconductor substrate is unloaded from a cassette, thereby effectively eliminating the static electricity. A body(610) is moved to transfer a semiconductor substrate, and a blade(612) is coupled to the body to load the semiconductor substrate. A hole line(620) penetrates the body and the blade, and exposes a surface of the blade. A vacuum pump(640) is connected to the hole line via a first line connected to the other end of the hole line and a second line connected to the first line. An ion supply unit(650) is connected to the hole line via a third line connected to the first line.