NON CONTACT TYPE-MICRO DISPLACEMENT MEASURING DEVICE USING PPTICAL SYSTEM

摘要

The present invention using an optical system that can measure small displacement of the object to be measured with non-contact by using an optical system relates to non-contact small displacement measuring device. ; According to the present invention, a light source for outputting light of a predetermined wavelength, a collimator for collimating the light output from the light source, the linearly polarized light that has passed through the collimator linear polarizer which, to transmit the light that has passed through the linear polariser, the measurement is reflected from the object reflecting the refracted light to the incident polarization is refracted "polarizing beam splitter", and transmits the light incident from the polarization beam splitter, the measurement object is reflected from a birefringent material which transmits the linearly polarized light by refracting incident is the phase delay, the birefringent body from permeating by converting the incident linear polarized light into circular polarized light, the light reflected from the measurement object circular polarization including the calculation processing for calculating the displacement of the conversion by the light of the linear polarized light transmitted through the phase delay of the optical detector for detecting the light reflected from the polarizing beam splitter, and the measurement on the basis of the detected light from the light detector target and is characterized in that configured. According to the configuration as described above, there is a simple to measure small displacement of the unit by a configuration advantage um.