METHOD OF SENSING A BLADE HORIZONTAL LEVEL AND WAFER TRANSFERRING EQUIPMENT USING THE SAME

摘要

provides a blade horizontal level detection method of the wafer transfer robot. The method includes running the wafer transfer process . Sets the acceptable range for the blade of a horizontal level difference . Measure the height of the first value of the first position of the blade mounted to the wafer transfer apparatus . Measure the second height of the second position of the blade . Calculates a first difference value between the first value and the height of the second height values . And comparing the first difference value and the allowable range . If the first difference value is outside the allowable range, and stops the wafer transfer process . The blade horizontal level detection method also provides a wafer transfer equipment using .