HYDROSTATIC ROTARY TABLE FOR ULTRA-PRECISION MACHINING

摘要

A hydrostatic rotary table for an ultra-precision processing is provided to improve rotation precision of a rotary table by minimizing an interval between a tool of a hydrostatic rotary table and a hydrostatic bearing. A hydrostatic rotary table for an ultra-precision processing includes a base(20), a cylindrical motor housing(30), a shaft(40), a rotation plate(50), a motor(60), and a hydrostatic bearing(70). The cylindrical motor housing is installed at the base. The shaft is vertically disposed at a center of the motor housing. The rotation plate is mounted at an upper end of the shaft. The motor is installed between the shaft and the motor housing, and rotates the shaft. The hydrostatic bearing is disposed at an upper portion of the motor housing in order to support the shaft. The hydrostatic bearing includes hydraulic chambers(70a,70b,70c) for providing hydrostatic pressure to the bearing disc(41).