APDPARATUS FOR FABRICATING FLAT PANEL DISPLAY DEVICE AND METHOD FOR FABRICATING THEREOF AND FLAT PANEL DISPLAY DEVICE AND METHOD FOR FABRICATING UESING THE SAME

摘要

An apparatus for fabricating a flat panel display device, a method for fabricating the same, a flat panel display device, and a method for fabricating the same are provided to simplify a manufacturing process of the flat panel display device while forming a planarization layer with uniform thickness by forming thin film patterns by a patterning process using a soft mold instead of a photolithography process. A device spreads an organic material on a substrate(180). A soft mold(234) has a base plane(234b) corresponding to an area where a first thin film pattern(150) is formed, a protruded part(234c) protruded from the base plane for deciding thickness of the first thin film pattern, and a groove(234a) depressed from the base plane and corresponding to an area where a second thin film pattern(152) having an area smaller than an area of the first thin film pattern, is formed. A device forms an organic layer having double steps by pressurizing the organic material.