Method for selective growth of carbon nanofilaments using heat-resistant metal catalysts

摘要

The present invention relates to a method for selectively growing carbon nanofilaments, and more particularly, comprising treating a substrate to have a surface having a desired shape, and forming a heat-resistant metal catalyst film thereon to form carbon nanofilaments thereon. A method for selective growth of carbon nanofilaments.;According to the selective growth method of the present invention, the process is greatly simplified and excellent in economic efficiency, for example, carbon nanofilaments can be easily grown and grown even at difficult points such as the tip end of an atomic microscope, and the growth of carbon nanofilaments It is possible to control the degree and growth point, and also due to the heat-resistant metal catalyst there is an effect that the bonding strength of the carbon nanofilament and the substrate is improved than before.;Carbon nanofilament, selective growth method, deposition, plasma, heat resistant metal