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THIN FILM MULTILAYER BODY, ELECTRONIC DEVICE USING SUCH THIN FILM MULTILAYER BODY, ACTUATOR, AND METHOD FOR MANUFACTURING ACTUATOR
THIN FILM MULTILAYER BODY, ELECTRONIC DEVICE USING SUCH THIN FILM MULTILAYER BODY, ACTUATOR, AND METHOD FOR MANUFACTURING ACTUATOR
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机译:薄膜多层主体,使用这种薄膜多层主体的电子设备,致动器以及制造致动器的方法
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摘要
An actuator (10) is formed by sequentially stacking an intermediate layer (12), a lower conductive layer (13), an oxide layer (14), and an upper conductive layer (15) on a silicon or GaAs single crystal substrate (11). The intermediate layer (12) of magnesia spinel (MgAl2O4), the lower conductive layer (13) of a platinum-group element or its alloy, and the oxide layer (14) of a crystalline structure having a simple perovskite lattice are epitaxially grown and formed. The oxide layer (14) is composed of a crystal having a simple perovskite lattice, and its (001) surface grows epitaxially. Accordingly, the oxide layer (14) has good crystallinity, and is excellent in dielectric constant, piezoelectric property, and electrostrictive property since a voltage application direction matches the polarization axis. IMAGE
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机译:通过在硅或GaAs单晶衬底(11)上依次堆叠中间层(12),下部导电层(13),氧化物层(14)和上部导电层(15)来形成致动器(10)。 )。外延生长氧化镁尖晶石(MgAl 2 O 4)的中间层(12),铂族元素或其合金的下部导电层(13)和具有简单钙钛矿晶格的晶体结构的氧化物层(14),并形成。氧化物层(14)由具有简单钙钛矿晶格的晶体构成,并且其(001)表面外延生长。因此,由于电压施加方向与极化轴一致,因此氧化物层(14)具有良好的结晶性,并且介电常数,压电性和电致伸缩性优异。 <图像>
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