THIN FILM MULTILAYER BODY, ELECTRONIC DEVICE USING SUCH THIN FILM MULTILAYER BODY, ACTUATOR, AND METHOD FOR MANUFACTURING ACTUATOR

摘要

An actuator (10) is formed by sequentially stacking an intermediate layer (12), a lower conductive layer (13), an oxide layer (14), and an upper conductive layer (15) on a silicon or GaAs single crystal substrate (11). The intermediate layer (12) of magnesia spinel (MgAl2O4), the lower conductive layer (13) of a platinum-group element or its alloy, and the oxide layer (14) of a crystalline structure having a simple perovskite lattice are epitaxially grown and formed. The oxide layer (14) is composed of a crystal having a simple perovskite lattice, and its (001) surface grows epitaxially. Accordingly, the oxide layer (14) has good crystallinity, and is excellent in dielectric constant, piezoelectric property, and electrostrictive property since a voltage application direction matches the polarization axis. IMAGE