DETECTING A DEFECT OF AN OBJECT BASED ON A COLOR IMAGE OF THE OBJECT

摘要

The present invention provides a technique to improve reliability of defect detecting process of an object under inspection. An object in which a through hole is formed is inspected. For the inspection, a color image of the object is acquired and a predetermined defect detecting is performed for a region of the color image other than a mask region. A specific region corresponding to the through hole and an adjoining region existing around the specific region are obtained from the color image of the object. According to color of the obtained adjoining region, size of the mask region including the specific region is modified.