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PRE-INSULATING SUBSTRATE, METHOD OF MANUFACTURING SUBSTRATE, METHOD OF MANUFACTURING SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE DEVICE, AND ELECTRONIC APPARATUS
PRE-INSULATING SUBSTRATE, METHOD OF MANUFACTURING SUBSTRATE, METHOD OF MANUFACTURING SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE DEVICE, AND ELECTRONIC APPARATUS
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机译:预绝缘基质,制造基质的方法,制造表面声波谐振器,表面声波谐振器,表面声波装置和电子设备
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摘要
A pre-insulating substrate includes a base including an electrically conductive portion on a surface of the base, and a protective film disposed on the surface of the base to cover part of the conductive portion so as to prevent insulating treatment from being implemented for the part of the conductive portion. The protective film has a peripheral part that is thicker than a region other than the peripheral part in the protective film.
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