Semiconductor micro gas sensor by micro-machining technique and method for manufacturing the sensor

摘要

A semiconductor micro gas sensor and a method of manufacturing the same are provided to maximize thermal efficiency of a heater by depositing a gas detection material on a portion of an insulating layer. A semiconductor micro gas sensor includes a first insulating layer(38), a detection electrode(36), a heater electrode(34), a second insulating layer, and a gas detection layer(50). The first insulating layer is formed at both sides of a silicon substrate by depositing an insulating material. The detection electrode is formed of a metal thin layer deposited on the first insulating layer. The heater electrode(34) is deposited on the first insulating layer and partially crosses the detection electrode. The second insulating layer exposes a portion of the detection electrode. The gas detection layer is deposited on the second insulating layer to form prominences and depressions.