Apparatus for minimizing ripple of DC output voltage of plasma power supply

摘要

In the present invention, a plurality of single-phase power supply for generating a plasma that is implemented as a high capacity due to the increase in load connected in parallel to the input terminal of the PWM inverter to each other so that they can be switched to another phase and to control the respective output terminal of the plurality of single-phase PWM inverter connected in series with a respective plurality of the rectifier in series and parallel connection increases the output capacity of the power supply for plasma generation relates to a device for increasing the capacity and output ripple reduction unit , has the effect of implementing a large capacity through an increase in the plasma power supply unit dose according to the present invention and for reducing the output ripple voltage through the control of a plurality of single-phase PWM inverter . ; plasma , power supply , single-phase PWM inverters , transformers , rectifiers , reactors